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The chamber atmosphere furnace adds vacuum system and gas supply system to the SLX series chamber resistance furnace. The atmosphere furnace is sealed by the outer casing, the cover is sealed with silicone mud, the furnace door is equipped with a water cooling system and a silica gel pad, and the flow rate is controlled by a flow meter.
The chamber atmosphere furnace adds vacuum system and gas supply system to the SLX series chamber resistance furnace. The atmosphere furnace is sealed by the outer casing, the cover is sealed with silicone mud, the furnace door is equipped with a water cooling system and a silica gel pad, and the flow rate is controlled by a flow meter.
The atmosphere furnace is mainly used for high temperature atmosphere sintering, atmosphere reduction, CVD experiment, melting, etc.
| Product type | SLQ1700-30 | SLQ1700-40 | SLQ1700-50 |
| L × W × H, mm | 300×200×200 | 400×300×300 | 500×400×400 |
| Working voltage (v) | 220 | 380 | 380 |
| Maximum power (kW) | 12 | 16 | 25 |
| Heating element | High quality silicon molybdenum rod | ||
| Working temperature | 300-1600 | ||
| Heating rate (°C/min) | ≤ 20 | ||
| Vacuum | Used vaccum:≤-0.02Mpa | ||
| Supplied gas | Oxygen, nitrogen, argon, hydrogen and other inert atmospheres | ||
| Atmospheric pressure | Used atmospheric pressure: ≤-0.03Mpa | ||
